Characterization of Microstructure Freeform Surfaces Using a Pattern Matching Analysis

نویسنده

  • C. F. Cheung
چکیده

Microstructure freeform surface is a type of freeform surfaces which is widely used in optical-mechanical-electronic components with increasing high precision requirement. This paper presents the characterization of structured freeform surfaces based on a pattern matching analysis method. The method employed rough matching by micro-structure features and then precise matching based on least squared criteria to optimize matching results. The capability of the proposed method is realized through a trial implementation of a prototype surface characterization system With the successful development of the pattern matching analysis method, the accuracy and the efficiency of the characterization of the microstructure freeform surfaces such as micro-lens array can be significantly increased.

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تاریخ انتشار 2008